Code No. | Size(mm) | Application |
CP-600 CP-601 |
590x1400 | Glass, Quartz Component |
840x1700 | ||
1000x1000 | ||
1320x1320 |
Code No. | Thickness (mm) | Density (g/cm3) | Hardness (Shore A) | Compressibility (%) | CeO2 conten(%) |
CP-600 | 0.8~5mm | 0.42±0.05 | 75±3 | 1.96 | 21~22 |
CP-601 | 0.8~5mm | 0.52±0.05 | 78±3 | 1.86 | 24~25 |
Polish time minute | Down force g/cm2 | RPM | Slurry | Removal rate um/min |
10 | 100 | 50 | CeO2 | 0.3 |